A comparison of two excitation modes for MEMS electrothermal displacement sensors
- Creator: Mohammadi, Ali , Moheimani, S. O. Reza , Yuce, Mehmet Rasit
- Resource Type: journal article
- Date: 2014
SNR improvement in MEMS electrothermal displacement sensors
- Creator: Mohammadi, A. , Moheimani, S. O. R. , Yuce, M. R.
- Resource Type: conference paper
- Date: 2014
Design, fabrication and characterization of a high-bandwidth 2DOF MEMS nanopositioner
- Creator: Maroufi, M. , Moheimani, S. O. R.
- Resource Type: conference paper
- Date: 2013
A readout circuit implementation to reduce the flicker noise in MEMS electrothermal sensors
- Creator: Mohammadi, A. , Yuce, M. R. , Moheimani, S. O. R.
- Resource Type: conference paper
- Date: 2012
Improved electrothermal position sensing in MEMS with non-uniformly shaped heaters
- Creator: Bazaei, Ali , Fowler, Anthony G. , Moheimani, S. O. Reza
- Resource Type: conference paper
- Date: 2012
A low-loss MEMS tunable capacitor with movable dielectric
- Creator: Zhu, Y. , Yuce, M. R. , Moheimani, S. O. R.
- Resource Type: conference paper
- Date: 2009